Femto Tools sensor

This is a silicon sensor micro-machined by the society Femto Tools. The displacements of the sensitive body are measured with a capacitive sensor integrated into the structure (fig. 3).

Figure 3: Femto Tools sensor.

Features:

• stiffness of 1000 N/m
• measurement from 0 to 2 mN with a resolution of 1 $\mu$N
• measure one component of an horizontal force

Known limitations:

• range of force exceeding the range that of the sensors described above §3.1 and §3.2
• most suitable for measurement of surface tension or to apply important load